Influence of Short Circuits on Data of Contact & Via Open Circuits Determined by a Novel Weave Test Structure

نویسندگان

  • Christopher Hess
  • Larg H. Weiland
چکیده

The influence that short circuits have on contact hole open circuits and via hole open circuits in regular string test structures will be investigated. To detect open circuits as well as short circuits in adjacent conducting layers of backend process steps, a novel weave test structure (WTS) is presented. Numerous contact strings or via strings are arranged inside boundary pads like a woven piece of cloth. So, also short circuits between different strings are electrically detectable.

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تاریخ انتشار 1995